Paper
1 August 1990 Photoreflectance measurements of indium content in semi-insulating indium-alloyed GaAs bulk substrates
S. Ravipati, P. W. Yu, B. E. Taylor, W. C. Mitchel
Author Affiliations +
Proceedings Volume 1286, Modulation Spectroscopy; (1990) https://doi.org/10.1117/12.20838
Event: Advances in Semiconductors and Superconductors: Physics Toward Devices Applications, 1990, San Diego, CA, United States
Abstract
We report the use of rooni-Lemperature photorefleetance measuremenLs to deLenitine radial arid axial nonuniformity of low levels of indium in 3-inch diameter semi-insulaLing GaAs bulk materials grown by the liquid-encapsulaLed Cochralski method. These resulLs were compared with umc. Types of inhomogeneities are discussed in Lerms of indium segregation and the shape of the solid and liquid interface during crystal growth.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. Ravipati, P. W. Yu, B. E. Taylor, and W. C. Mitchel "Photoreflectance measurements of indium content in semi-insulating indium-alloyed GaAs bulk substrates", Proc. SPIE 1286, Modulation Spectroscopy, (1 August 1990); https://doi.org/10.1117/12.20838
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KEYWORDS
Gallium arsenide

Semiconducting wafers

Crystals

Indium

Spectroscopy

Modulation

Solids

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