Preparation of thin-film oxide superconductor, Y1Ba2Cu3O7-delta by facing-targets sputtering deposition

Yasuo Takagi

doi:10.1117/12.20878

1 October 1990 Preparation of thin-film oxide superconductor, Y1Ba2Cu3O7-delta by facing-targets sputtering deposition

Yasuo Takagi

Proceedings Volume 1287, High Tc Superconductivity: Thin Films and Applications; (1990) https://doi.org/10.1117/12.20878
Event: Advances in Semiconductors and Superconductors: Physics Toward Devices Applications, 1990, San Diego, CA, United States

Abstract

Thin-film oxide superconductor, Y1B a2Cu307.delta was prepared onto singlecrystal MgO (100) substrates by facing-targets sputtering (FTS) deposition technique. Throughout the various preparation conditions, little deviation of the compositional ratios of the metallic elements in the as-prepared films from those of the targets: i.e. Y:Ba:Cu = 1 :2:3 was observed. The atomic structures and properties of superconductivity of the as-prepared films largely depended on the substrate temperature, T. They were classified as the following five regions. Region I: 720 °C > T > 670 °C. The films had c-axis oriented Y1Ba2Cu3O7 structure having T0 > 70 K. Region II: 670 °C > T5 > 630 °C and 770 °C > Ts > 720 °C. The polycrystalline Y1Ba2Cu3O7 having T0 - 40 K was observed. Region III: 800 °C > T > 770 °C and 530 °C > T > 400 °C. A different crystalline structure having ca. 1/3 periodicities of the c-axis length of Y 1B a2Cu307.8 appeared. It had semiconductor-like temperature dependence of the electric resistivity. Region IV: 630 °C > T > 530 °C. A transition region between Regions I & III. The polycrystalline Y1 B a2 C u 0 and the "1/3 periodicity" structures coexisted. Region V: 400 °C > T > R.T. The films were amorphous and electrically insulating. The dependence of the structure on T will be explained by two factors which govern the crystal growth process: One is the surface mobility of the depositing atoms on the surface of the films; the other, configurational entropy of each crystal structure grown in the films.

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Yasuo Takagi "Preparation of thin-film oxide superconductor, Y1Ba2Cu3O7-delta by facing-targets sputtering deposition", Proc. SPIE 1287, High Tc Superconductivity: Thin Films and Applications, (1 October 1990); https://doi.org/10.1117/12.20878

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KEYWORDS

Sputter deposition

Thin films

Crystals

Superconductivity

Oxides

Superconductors

Reflection

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