Microfabrication of thermoset polymer PDMS using laser-induced bubble (microFLIB) and its mechanism study

Yoichi Toba; Yasutaka Hanada

doi:10.1117/12.3001300

12 March 2024 Microfabrication of thermoset polymer PDMS using laser-induced bubble (microFLIB) and its mechanism study

Yoichi Toba, Yasutaka Hanada

Author Affiliations +

Proceedings Volume 12872, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX; 1287209 (2024) https://doi.org/10.1117/12.3001300
Event: SPIE LASE, 2024, San Francisco, California, United States

Abstract

Laser-induced bubbles can be formed by focusing a conventional nanosecond (ns) laser in a liquid. We recently developed a microfabrication technique (microfabrication using laser-induced bubble (microFLIB)) and applied it to polydimethylsiloxane (PDMS), a thermoset polymer. The technique enabled the rapid fabrication of a high-quality microfluidic channel on a PDMS substrate and selective metallization of the channel via subsequent electroless plating. In addition, we found out that this technique enables true three-dimensional (3D) microfabrication of PDMS so that a hollow microfluidics can be embedded in the polymer substrate. Furthermore, a through hole having high aspect ratio of more than 200 can be fabricated by the single laser scanning. In the experiments, a ns laser beam was focused inside uncured liquid PDMS and was scanned to generate line of laser-induced bubbles. In the microFLIB processing, the shape of the created bubbles was retained in the uncured PDMS for a while; thus, the line of bubbles generated by the laser scanning successfully produced a microfluidic channel on and inside the PDMS substrate after subsequent thermal curing. However, mechanism of this process still remains unclear. Therefore, in this presentation, we will introduce how the microFLIB works in detail and investigate the behaviors of the bubble in the uncured PDMS and explore how the bubble connect to each other during the microFLIB using pump-probe imaging technique.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Yoichi Toba and Yasutaka Hanada "Microfabrication of thermoset polymer PDMS using laser-induced bubble (microFLIB) and its mechanism study", Proc. SPIE 12872, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX, 1287209 (12 March 2024); https://doi.org/10.1117/12.3001300

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