Dynamic focus control in a coherent lidar using a fast MEMS mirror

Andrew D. Oliver; Stevens L. Shea; Michael R. Roddewig; Joseph A. Shaw; David L. Dickensheets

doi:10.1117/12.3000543

12 March 2024 Dynamic focus control in a coherent lidar using a fast MEMS mirror

Andrew D. Oliver, Stevens L. Shea, Michael R. Roddewig, Joseph A. Shaw, David L. Dickensheets

Proceedings Volume 12899, MOEMS and Miniaturized Systems XXIII; 128990C (2024) https://doi.org/10.1117/12.3000543
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

This paper demonstrates the use of a variable focus MEMS mirror in a frequency-modulated continuous-wave (FMCW) lidar system. The mirror can reveal short range targets that are typically hidden because the lidar was out of focus, and has demonstrated the ability to increase the signal level by over 20 dB for close-range targets. We have also demonstrated the ability to dynamically change the focus of the lidar during each sweep of the galvonometer, thus allowing the resolution of targets at different ranges during each sweep. The electrostatically driven 4 mm diameter mirror has a transition time of less than 1 ms and a focal length that can range from infinity to 56 mm which corresponds to wavefront Zernike fringe defocus coefficient ranging from 0 to 18 μm.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Andrew D. Oliver, Stevens L. Shea, Michael R. Roddewig, Joseph A. Shaw, and David L. Dickensheets "Dynamic focus control in a coherent lidar using a fast MEMS mirror", Proc. SPIE 12899, MOEMS and Miniaturized Systems XXIII, 128990C (12 March 2024); https://doi.org/10.1117/12.3000543

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