Biaxial resonant MEMS mirrors with large field of view for LiDAR systems

L. Wysocki; J.-Y. Hwang; P. Schütt; P. Raschdorf; E. Yarar; G. Wille; S. Gu-Stoppel

doi:10.1117/12.3002711

12 March 2024 Biaxial resonant MEMS mirrors with large field of view for LiDAR systems

L. Wysocki, J.-Y. Hwang, P. Schütt, P. Raschdorf, E. Yarar, G. Wille, S. Gu-Stoppel

Proceedings Volume 12899, MOEMS and Miniaturized Systems XXIII; 128990H (2024) https://doi.org/10.1117/12.3002711
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

Future industrial production will be characterized by the collaborative work of humans and robots, sharing the same factory area (almost) simultaneously. To realize this cooperation in an efficient and safe way, powerful LiDAR systems with a large field of view are essential in order to permanently supervise the human-robot interaction and give instructions for the robotic motion based on the current human behavior. Piezoelectrically driven, resonant MEMS mirrors are often at the heart of such LiDAR systems, due to their high speed, electric power efficiency, and compactness. However, not only the achievable optical field of view, but also the resonant frequencies of the mirror eigenmodes are key parameters that need to be suitable for the specific application scenario and the system components, such as the laser. In this study, we present the FEM-simulation-based development of biaxial MEMS mirrors with 3 mm aperture, specifically optimized for the use in a LiDAR system to monitor and control the human-robot collaboration. The gimbal-less mirrors of Design 1 (and Design 2) exhibit a diminishing coupling between the two resonant modes at 2.4 kHz (2.3 kHz) and 5.6 kHz (5.0 kHz). This enables the individual control of the mirror movement along the two orthogonal axes and a very good light density. The two presented mirrors realize scanned field of views of 60° x 32° and 42° x 42° rectangles, respectively, showing almost no pincushion distortions. Due to the reduced mechanical coupling and mutual influence, the sensing signals possess a high signal-to-noise ratio, enabling the precise determination of the mirror position.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

L. Wysocki, J.-Y. Hwang, P. Schütt, P. Raschdorf, E. Yarar, G. Wille, and S. Gu-Stoppel "Biaxial resonant MEMS mirrors with large field of view for LiDAR systems", Proc. SPIE 12899, MOEMS and Miniaturized Systems XXIII, 128990H (12 March 2024); https://doi.org/10.1117/12.3002711

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available