Developing on-machine, In-process sensors enabled by multifunctional metasurface elements

Daniel J. Townend; Andrew J. Henning; Justin H. T. Chan; James Williamson; Dawei Tang; Nityanand Sharma; Haydn Martin; Xiangqian Jiang

doi:10.1117/12.3016748

18 June 2024 Developing on-machine, In-process sensors enabled by multifunctional metasurface elements

Daniel J. Townend, Andrew J. Henning, Justin H. T. Chan, James Williamson, Dawei Tang, Nityanand Sharma, Haydn Martin, Xiangqian Jiang

Author Affiliations +

Proceedings Volume 12997, Optics and Photonics for Advanced Dimensional Metrology III; 1299703 (2024) https://doi.org/10.1117/12.3016748
Event: SPIE Photonics Europe, 2024, Strasbourg, France

Abstract

Manufacturing is progressing towards the utilisation of smart and autonomous manufacturing processes, facilitated by deeply integrated sensors providing rapid feedback, to enable tighter process control and ‘right first-time’ fabrication methods. Optical components are inherently heavy and bulky and consequently so is current optical instrumentation making it unsuitable to provide the in-situ measurements required to fully realise the vision of future manufacturing. Optical metasurfaces, being able to replicate the function of conventional optical elements, offer a step change in optical instrumentation size and weight. Here, we report on our monolithic metasurface confocal sensor that performs all the necessary optical manipulations to perform as an ultra-compact confocal sensor whilst also being rugged against misalignment. We have subsequently built on this approach to develop a tip-tilt displacement sensor which is achieved by interleaving three lenses into a single metasurface, each acting as a chromatic confocal sensor that is offset from each other.

Conference Presentation

Citation Download Citation

Daniel J. Townend, Andrew J. Henning, Justin H. T. Chan, James Williamson, Dawei Tang, Nityanand Sharma, Haydn Martin, and Xiangqian Jiang "Developing on-machine, In-process sensors enabled by multifunctional metasurface elements", Proc. SPIE 12997, Optics and Photonics for Advanced Dimensional Metrology III, 1299703 (18 June 2024); https://doi.org/10.1117/12.3016748

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