Adapting multi-lateral shearing interferometry to new measurement needs: metasurfaces and segmented surfaces

Jérôme Primot; Cécile Le Gall; Bastien Rouzé; Julien Jaeck; Cindy Bellanger

doi:10.1117/12.3016920

18 June 2024 Adapting multi-lateral shearing interferometry to new measurement needs: metasurfaces and segmented surfaces

Jérôme Primot, Cécile Le Gall, Bastien Rouzé, Julien Jaeck, Cindy Bellanger

Author Affiliations +

Proceedings Volume 12997, Optics and Photonics for Advanced Dimensional Metrology III; 129970C (2024) https://doi.org/10.1117/12.3016920
Event: SPIE Photonics Europe, 2024, Strasbourg, France

Abstract

The aim of this lecture is to show how the consideration of very specific measurement requirements, related to segmented surfaces and metasurfaces, has enabled a generalist multilateral shearing interferometer to evolve into new innovative devices. This has enabled state-of-the-art performance to be achieved, in particular by exploiting in the design a priori knowledge of the objects to be measured. Performance is illustrated here by a comparison of measurements on a canonical object, a PTT-111 deformable mirror from the company Iris AO, with a reference Phase Shifting Interferometer from the community.

Conference Presentation

Citation Download Citation

Jérôme Primot, Cécile Le Gall, Bastien Rouzé, Julien Jaeck, and Cindy Bellanger "Adapting multi-lateral shearing interferometry to new measurement needs: metasurfaces and segmented surfaces", Proc. SPIE 12997, Optics and Photonics for Advanced Dimensional Metrology III, 129970C (18 June 2024); https://doi.org/10.1117/12.3016920

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