Dariusz Litwinhttps://orcid.org/0000-0002-5734-9575,1 Kamil Radziak,1 Adam Czyżewski,1 Jacek Galas,1 Tadeusz Kryszczyński,1 Robert Szumski,2 Justyna Niedziela2
1Łukasiewicz Research Network-Tele and Radio Research Institute (Poland) 2Central Office of Measures (Poland)
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The paper discusses an alternative approach to the variable wavelength interferometry. The technique is based on specialized composition of two birefringent prisms that are inserted in a classical microscope with the Köhler illumination system. The optical system includes a continuously tuned light source and consists in advanced processing of sequentially recorded images at different wavelengths. The instrument is suitable for both transmitted and reflected-light modes and allows the user to measure optical and geometrical parameters of phase or reflective structures. This paper focuses on the reflected-light mode set-up, and measurements of waveplates and step height standards. The low uncertainty of the optical path difference is obtained by the continuous character of the light source and constitutes a key element of the system. In contrast to some previous presentations on the variable wavelength interferometry this paper demonstrates more profound nature of the phenomenon and a more precise algorithm for the fringe image processing.
Conference Presentation
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Dariusz Litwin, Kamil Radziak, Adam Czyżewski, Jacek Galas, Tadeusz Kryszczyński, Robert Szumski, Justyna Niedziela, "Multispectral interferometry for characterizing nano-objects," Proc. SPIE 12997, Optics and Photonics for Advanced Dimensional Metrology III, 129970F (18 June 2024); https://doi.org/10.1117/12.3017614