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Monochromatic monitoring by intermittent measuring technique is established as a standard optical thickness control for thin films in box coaters since 2005. A newly developed set-up of the optical path was designed for the Syruspro 1100 DUV box-coater series. A deuterium lamp in combination with an achromatic lens system extends the monitoring capabilities to the UV range for wavelengths from 200nm up to 380nm. We present the hardware set-up and coating results for various DUV coatings.
Conference Presentation
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Detlef Arhilger, Harro Hagedorn, Alfons Zöller, "Advances in direct monochromatic monitoring for the DUV range," Proc. SPIE 13020, Advances in Optical Thin Films VIII, 130200Q (24 June 2024); https://doi.org/10.1117/12.3021834