Differential confocal microimaging with non-uniform reflection suppression

Jun Xiang; Xingyang Xie; Yuguo Cui; Tengfei Wang; Dan Liang

doi:10.1117/12.3025410

28 February 2024 Differential confocal microimaging with non-uniform reflection suppression

Jun Xiang, Xingyang Xie, Yuguo Cui, Tengfei Wang, Dan Liang

Proceedings Volume 13071, International Conference on Mechatronic Engineering and Artificial Intelligence (MEAI 2023); 130712B (2024) https://doi.org/10.1117/12.3025410
Event: International Conference on Mechatronic Engineering and Artificial Intelligence (MEAI 2023), 2023, Shenyang, China

Abstract

A novel method for suppressing non-uniform reflection in differential confocal microimaging is proposed in this paper. The method is based on the differential confocal optical path and aims to eliminate the influence of non-uniform reflection perturbation on the surface contour imaging of highly stepped samples. This is achieved by dividing the squared difference between the pre-focus and post-focus signals of the differential confocal by the larger value of the squared pre-focus and post-focus signals. The effectiveness of the proposed method is demonstrated through theoretical analysis, simulation, and experimental verification. The results show that the method can successfully realize height imaging of height step samples. It is found that non-uniform reflection perturbation only affects the edge overshoot and position of the height profile imaging curve. This method can achieve high-precision, high-efficiency, and non-contact measurement of step samples with non-uniform reflection disturbances. This has significant implications for various applications requiring accurate surface contour imaging.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Jun Xiang, Xingyang Xie, Yuguo Cui, Tengfei Wang, and Dan Liang "Differential confocal microimaging with non-uniform reflection suppression", Proc. SPIE 13071, International Conference on Mechatronic Engineering and Artificial Intelligence (MEAI 2023), 130712B (28 February 2024); https://doi.org/10.1117/12.3025410

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