Key aspects of sub-nanometer deterministic ion beam figuring for synchrotron hard x-ray mirror fabrication

Tianyi Wang; Lei Huang; Yi Zhu; Nathalie Bouet; Corey Austin; Mourad Idir

doi:10.1117/12.3027640

30 September 2024 Key aspects of sub-nanometer deterministic ion beam figuring for synchrotron hard x-ray mirror fabrication

Tianyi Wang, Lei Huang, Yi Zhu, Nathalie Bouet, Corey Austin, Mourad Idir

Author Affiliations +

Proceedings Volume 13134, Optical Manufacturing and Testing 2024; 131340K (2024) https://doi.org/10.1117/12.3027640
Event: Optical Engineering + Applications, 2024, San Diego, California, United States

Abstract

Achieving sub-nanometer precision in ion beam figuring (IBF) processes demands a comprehensive understanding and optimization of various key aspects, including metrology, dwell time optimization, velocity scheduling, positioning, and final inspection. In this study, these aspects are analyzed and discussed. Our solutions for the challenges in each aspect are highlighted, with implications for a wide range of applications requiring ultra-precise optical components.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Tianyi Wang, Lei Huang, Yi Zhu, Nathalie Bouet, Corey Austin, and Mourad Idir "Key aspects of sub-nanometer deterministic ion beam figuring for synchrotron hard x-ray mirror fabrication", Proc. SPIE 13134, Optical Manufacturing and Testing 2024, 131340K (30 September 2024); https://doi.org/10.1117/12.3027640

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