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26 August 2024 Projection exposure on inner surfaces of cylindrical pipes using a cone mirror
Kenji Shintani, Shotaro Hattori, Kenji Kobayashi, Toshiyuki Horiuchi, Hiroshi Kobayashi
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Proceedings Volume 13177, Photomask Japan 2024: XXX Symposium on Photomask and Next-Generation Lithography Mask Technology; 131770Y (2024) https://doi.org/10.1117/12.3032250
Event: Photomask Japan 2024, 2024, Yokohama, Japan
Abstract
To groove inner surfaces of cylindrical pipes, mechanical machining was mainly used. However, it was difficult to groove complex and minute shapes precisely. Considering such circumstances, a new lithography system for printing patterns on inner surfaces of cylindrical pipes was thought up and investigated here. In the system, patterns on a flat reticle were projected onto an inner surface of cylindrical pipes using a cone mirror. In addition, observation optics for monitoring pattern images on the inner surface was added. By placing a beam splitter between the reticle and the projection lens, reflected images of the pipe inside were observed using a CCD camera and a monitor. After the position of cylindrical pipe was adjusted as the reflected images became most clear, patterns were printed. Transparent glass pipes with an outer diameter of 16.5 mm and an inner diameter of 14 mm were used as specimens, because it was possible to check the printed resist patterns from the outside. When negative resist PMER N-CA3000 PM was coated on the inner surface in 10-μm thick, and a reticle with concentric circular patterns was used, circumferential 50-μm line and space patterns were printed. Some subjects to be improved were clarified also.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Kenji Shintani, Shotaro Hattori, Kenji Kobayashi, Toshiyuki Horiuchi, and Hiroshi Kobayashi "Projection exposure on inner surfaces of cylindrical pipes using a cone mirror", Proc. SPIE 13177, Photomask Japan 2024: XXX Symposium on Photomask and Next-Generation Lithography Mask Technology, 131770Y (26 August 2024); https://doi.org/10.1117/12.3032250
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KEYWORDS
Pipes
Mirror surfaces
Reticles
Conical mirrors
Printing
Optical surfaces
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