Acquisition of 3-D data by a heterodyne shearing interferometer with photoelastic modulation

Gerd Haeusler; Hans Weissmann

doi:10.1117/12.34740

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1 July 1990 Acquisition of 3-D data by a heterodyne shearing interferometer with photoelastic modulation

Gerd Haeusler, Hans Weissmann

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Proceedings Volume 1319, Optics in Complex Systems; (1990) https://doi.org/10.1117/12.34740
Event: 15th International Optics in Complex Systems, 1990, Garmisch, Germany

Abstract

We show a system for sequential distance measurement which works as a 3D-sensor. One point of the object is illuminated via an xy-scanning-system. The scattered wave carries the distance information in its curvature at the location of the sensor. We collinearly measure the radius of this wave in the sensor plane by shearing interferometry. Heterodyne modulation of the interference pattern is performed by a photoelastic modulator for high speed and robustness against environmental light. The sensor requires very small apertures for illumination and detection so shading effects and hidden points are minimized. 2.

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Gerd Haeusler and Hans Weissmann "Acquisition of 3-D data by a heterodyne shearing interferometer with photoelastic modulation", Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); https://doi.org/10.1117/12.34740

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