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1 July 1990 Application of diffusion and photosensitizing techniques in PMMA to optical interconnects
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Proceedings Volume 1319, Optics in Complex Systems; (1990)
Event: 15th International Optics in Complex Systems, 1990, Garmisch, Germany
A new technique for the three dimensional integration of optical components is presented. It is based on diffusion techniques and photoinitiated polymerization. Initial experimental results demonstrate the feasibility and efficiency. DIFFUSION jQ PHOTOINITIATED POLYMERISA11ON We want to combine diffusion with photoinitiated polymerization in order to form passive elements which are necessary for three dimensional integration of optical components for microoptical systems1''2. The production of optical elements by photopolymerization consists of two main steps. First the PMMA is sensitized to ultraviolet light by diffusing a photoinitiator into the substrat. Then the exposure by UV light causes an increase in the thickness and in the refractive index. The structuring can be achieved either by local diffusion and global exposure for stabilization or by global diffusion and local exposure. In the first case metal-masks for the diffusion process are necessary whereas in the second case photo-masks can be used. OPTICAL INTERCONNECFION For realizing a flexible optical interconnection plate3''4 the necessary functions are: light collimation light deflection and beam splitting. Collimation can be achieved by microlenses. For deflection we use a miniaturized prism. For beam splitting an index grating can be used. The components are integrated within a planar PMMA plate. EXPERIMENTAL RESULTS By measuring the phase profile of diffused lenses and prisms we demonstrated that phase shifts of several wavelengths can be achieved by polymerization and diffusion techniques. The main effect results from the
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Karl-Heinz Brenner, Maria Kufner, Stefan Kufner, Stefan Sinzinger, and Markus E. Testorf "Application of diffusion and photosensitizing techniques in PMMA to optical interconnects", Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990);

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