Interferometric measurement of the optical penetration depth into a processed surface

Hirokazu Matsumoto; Yucong Zhu; Tokuyuki Honda

doi:10.1117/12.34889

1 July 1990 Interferometric measurement of the optical penetration depth into a processed surface

Hirokazu Matsumoto, Yucong Zhu, Tokuyuki Honda

Proceedings Volume 1319, Optics in Complex Systems; (1990) https://doi.org/10.1117/12.34889
Event: 15th International Optics in Complex Systems, 1990, Garmisch, Germany

Abstract

The penetration depth of light into a processed surface is interferometrically ieasured by optically contacting it on a glass plate with a resolution of 3 urn. This principle is based on the ieasurement of the difference between the phase changes of light in reflections on the object and the glass plate. Also the depth is siiiultanecusly measured by an optical systeii with a phase-locked laser interferometer and an optical displacement sensor. 1 .

Citation Download Citation

Hirokazu Matsumoto, Yucong Zhu, and Tokuyuki Honda "Interferometric measurement of the optical penetration depth into a processed surface", Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); https://doi.org/10.1117/12.34889

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available