Dependence of precursor chemistry and curing conditions on optical loss characteristics of polyimide waveguides

Chung-Ping Chien; Kishore K. Chakravorty

doi:10.1117/12.22408

1 December 1990 Dependence of precursor chemistry and curing conditions on optical loss characteristics of polyimide waveguides

Chung-Ping Chien, Kishore K. Chakravorty

Author Affiliations +

Proceedings Volume 1323, Optical Thin Films III: New Developments; (1990) https://doi.org/10.1117/12.22408
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

Planar Waveguides were fabricated from three polyimide samples differing significantly in terms of their precursor and curing chemistry. The samples were selected from the groups of non-photosensitive preimidized, photosensitive preimidized and photosensitive polyamic ester precursor based polyimides. We observed significant differences in the waveguiding characteristics of these films which demonstrate the critical role of precursor chemistry on the optical properties. Curing conditions such as heating rate and bake duration also affected the optical properties. A scattering loss of less than 0.7 dB/cm was measured for waveguides fabricated from the photosensitive preimidized samples. On the other hand the photosensitive polyamic ester bas,ed samples registered a loss of greater than 1.5 dB/cm. In general the scattering loss increased with the bake temperature. The magnitude of the increase was much higher for the photosensitive polyamic ester based samples. UV exposure also affected the waveguiding characteristics and caused formation of scattering centers as evidenced by the increase in the scattering losses associated with these waveguides. Planar waveguides based on photosensitive preimidized precursor, retained excellent lightguiding properties even after high processing temperatures (Optical losses in these waveguides remained below 1.0 dB/cm after a 300 °C bake).

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Chung-Ping Chien and Kishore K. Chakravorty "Dependence of precursor chemistry and curing conditions on optical loss characteristics of polyimide waveguides", Proc. SPIE 1323, Optical Thin Films III: New Developments, (1 December 1990); https://doi.org/10.1117/12.22408

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