Structural refinement of superlattices from x-ray diffraction

Ivan K. Schuller; E. Fullerton; H. Vanderstraeten; Yvon Bruynseraede

doi:10.1117/12.22435

1 December 1990 Structural refinement of superlattices from x-ray diffraction

Ivan K. Schuller, E. Fullerton, H. Vanderstraeten, Yvon Bruynseraede

Proceedings Volume 1324, Modeling of Optical Thin Films II; (1990) https://doi.org/10.1117/12.22435
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

We have performed extensive model calculations in order to understand the effect that roughness has on the X-ray diffraction from multilayers. We have developed models to calculate the low and the high angle X-ray diffraction spectra, including kinematic and dynamical simulations. These model calculations were used to understand a variety of systems including crystalline/crystalline, crystalline/amorphous and amorphous/amorphous multilayers. These model calculations were compared with the diffraction spectra of multilayered systems prepared using sputtering and Molecular Beam Epitaxy (MBE) techniques. Using the experience acquired from these model calculations we have recently developed a comprehensive nonlinear optimization program to refine the structure of multilayers from X-ray diffraction spectra. Kinematic formulation is used to refine the high angle data and dynamical (Fresnel) formalism was used to fit the low angle spectra. A comparison of the results obtained from the structural refinements with EXAFS and artificially prepared rough multilayers indicates that this type of approach give a reliable and speedy determination of the roughness, interdiffusion and lattice parameter variations in multilayers. This work has been described in a number of papers in the last few years.

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Ivan K. Schuller, E. Fullerton, H. Vanderstraeten, and Yvon Bruynseraede "Structural refinement of superlattices from x-ray diffraction", Proc. SPIE 1324, Modeling of Optical Thin Films II, (1 December 1990); https://doi.org/10.1117/12.22435

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