Phase measurement method based on sub-sampling solution for high-precision high-speed distance measurement

Linbin Luo; Sihan Lu; Yifeng Wang; Shengtong Wang; Feifan Cao; Guochao Wang

doi:10.1117/12.3036415

20 November 2024 Phase measurement method based on sub-sampling solution for high-precision high-speed distance measurement

Linbin Luo, Sihan Lu, Yifeng Wang, Shengtong Wang, Feifan Cao, Guochao Wang

Author Affiliations +

Proceedings Volume 13241, Optical Metrology and Inspection for Industrial Applications XI; 132410X (2024) https://doi.org/10.1117/12.3036415
Event: SPIE/COS Photonics Asia, 2024, Nantong, Jiangsu, China

Abstract

In this work, a solution based on sub-sampling technology for heterodyne signals is proposed. While achieving higher measurement resolution and measurement speed, the performance requirements for the analog-to-digital converter and microprocessor are greatly reduced. The heterodyne signal is a sparse signal with a single frequency at each moment, only its phase offset contains displacement information. We use the pulse counting method to obtain the periods of the signal, and a sampler with a sampling rate well below the frequency of the heterodyne signal. The phase of the sampling point can be restored through sub-sampling technology and extended Kalman filtering. In the experiment, we used 16-bit ADCs with a 600 Ksas sampling rate to sample the heterodyne signals with a center frequency of 10 MHz and the dynamic range from 1 MHz to 19 MHz. The simulation results indicate that our method can effectively calculate the phase information of the interference signal.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Linbin Luo, Sihan Lu, Yifeng Wang, Shengtong Wang, Feifan Cao, and Guochao Wang "Phase measurement method based on sub-sampling solution for high-precision high-speed distance measurement", Proc. SPIE 13241, Optical Metrology and Inspection for Industrial Applications XI, 132410X (20 November 2024); https://doi.org/10.1117/12.3036415

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KEYWORDS

Heterodyning

Phase measurement

Signal processing

Interferometers

Sampling rates

Diffraction gratings

Distance measurement

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