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10 October 2024 Fast convergence of shapes using atmospheric inductively coupled plasma
Peiqi Jiao, Bin Fan, Qiang Xin, Xiang Wu, Yujuan Zhang, Hong Wang
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Proceedings Volume 13278, Seventh Global Intelligent Industry Conference (GIIC 2024); 132780B (2024) https://doi.org/10.1117/12.3032179
Event: Seventh Global Intelligent Industry Conference (GIIC 2024), 2024, Shenzhen, China
Abstract
Plasma machining technology is an advanced optical manufacturing technology developed in recent years, which can quickly mitigate or remove surface/subsurface damage caused by conventional optical machining methods, as well as the advantages of efficient, high-precision and high-resolution trimming of optical surface shapes. In this paper, based on atmospheric inductively coupled plasma (ICP), we analyze the effects of changes in reactive gas flow, power, and residence time on the removal function during processing, as well as experiments on the long-time stability of the plasma jet. Finally, selected appropriate machining parameters and performed trimming machining on the element to make the surface shape converge quickly and reduce the low-frequency error of the shape.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Peiqi Jiao, Bin Fan, Qiang Xin, Xiang Wu, Yujuan Zhang, and Hong Wang "Fast convergence of shapes using atmospheric inductively coupled plasma", Proc. SPIE 13278, Seventh Global Intelligent Industry Conference (GIIC 2024), 132780B (10 October 2024); https://doi.org/10.1117/12.3032179
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KEYWORDS
Plasma
Atmospheric plasma
Etching
Atmospheric optics
Optics manufacturing
Optical surfaces
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