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1 January 1991 Design criteria of an integrated optics microdisplacement sensor
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Abstract
Interferometer sensors using optical waveguides have been shown to be suitable for sensing a vanety of physical items such as temperature, strain, humidity, electric and magnetic fields, posItion. In this paper we study an integrated optical microdisplacement sensor making use of a Michelson interferometric configuration. The two-beam semi-asymmetric X junction is composed of four single-mode Ti diffused LiNbO3 channel waveguides at ? = 633 nm. The design criteria stress the fact that the waveguide runs at a given angle with respect to the principal reference system. The electromagnetic field evolution is obtained both by mode-matching and beam propagation methods.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Antonio d'Alessandro, Marco De Sario, Antonella D'Orazio, and Vincenzo Petruzzelli "Design criteria of an integrated optics microdisplacement sensor", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); https://doi.org/10.1117/12.51105
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