Effects of the nonvanishing tip size in mechanical profile measurements

Eugene L. Church; Peter Z. Takacs

doi:10.1117/12.51099

1 January 1991 Effects of the nonvanishing tip size in mechanical profile measurements

Eugene L. Church, Peter Z. Takacs

Proceedings Volume 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection; (1991) https://doi.org/10.1117/12.51099
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

The high-spatial--fregiency behavior of rrethanical-profiling instrunents is determin principal ly by the non-linear geaitrica1 interaction beten the styl us tip and the surface irreularities. 'there is cons iderable interest in the nature of this interaction and its effects in practical applications. This paper explores the these issues analytically and pesents a riety of results with enphasis on the freuency-danain description. Smooth surfaces are treat1 by perturbation theory and are found to be rot4iened by tip-s ize effects , tiile rough surfaces are snoothed. In lieu of closel fotm results for rot4i surfaces, offer a simple conjecture rerding the nature of tip-s ize distortions and the rnaxinurn useable spatial freuenoj.

Citation Download Citation

Eugene L. Church and Peter Z. Takacs "Effects of the nonvanishing tip size in mechanical profile measurements", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); https://doi.org/10.1117/12.51099

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