Laser moire topography for 3-D contour measurement

Tetsuya Matsumoto; Yoichi Kitagawa; Masaaki Adachi; Akihiro Hayashi

doi:10.1117/12.51101

1 January 1991 Laser moire topography for 3-D contour measurement

Tetsuya Matsumoto, Yoichi Kitagawa, Masaaki Adachi, Akihiro Hayashi

Proceedings Volume 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection; (1991) https://doi.org/10.1117/12.51101
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

The use of the phase shifting interferometric technique is discussed to make quantitative surface profiling using the Nomarski differential interference microscope. Lateral shift of the Nomarski prism introduces mutual phase shift between interfering two wavefronts with small amount of shear. Since the analyzed phase distribution corresponds to the differential of the surface profile under test, integration of the phase distribution gives the correct surface topography. The procedure for an analysis method and experimental results are presented.

Citation Download Citation

Tetsuya Matsumoto, Yoichi Kitagawa, Masaaki Adachi, and Akihiro Hayashi "Laser moire topography for 3-D contour measurement", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); https://doi.org/10.1117/12.51101

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