Review of interferogram analysis methods

Daniel Malacara-Hernandez

doi:10.1117/12.51118

1 January 1991 Review of interferogram analysis methods

Daniel Malacara-Hernandez

Proceedings Volume 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection; (1991) https://doi.org/10.1117/12.51118
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

Various aspects of interferogram analysis are reviewed. Fixed interferogram evaluation, fringe measurements, the global interpolation of interferograms, the application of Zernike polynomials, Fourier analysis of interferograms, and phase-shifting interferometry are described. Under the latter heading, the methods of zero crossing, phase lock, phase stepping, integrating phase shifting, and sub-Niquist and two-wavelength interferometry are considered.

Citation Download Citation

Daniel Malacara-Hernandez "Review of interferogram analysis methods", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); https://doi.org/10.1117/12.51118

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