Paper
1 November 1990 In-process mirror figure qualification procedure for large deformable mirrors
YenCheng Shen, Gregory P. Ruthven, GonYen Shen
Author Affiliations +
Abstract
One of the unique properties of deformable mirrors is their ability to be shaped. The as-assembled mirror figure can vary greatly, depending on the adjustment capability of the actuators used to shape it. Due to these variations, it is difficult to directly interpret progress during the mirror-polishing cycle when the interpretation is based only upon the metrology mterferometric readings. An in-process figure qualification procedure, which has been developed at Hughes Danbury Optical Systems, is described in this paper. By facilitating the real time monitoring of progress, the application of this procedure will accelerate the fabrication process of large deformable mirrors.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
YenCheng Shen, Gregory P. Ruthven, and GonYen Shen "In-process mirror figure qualification procedure for large deformable mirrors", Proc. SPIE 1333, Advanced Optical Manufacturing and Testing, (1 November 1990); https://doi.org/10.1117/12.22818
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KEYWORDS
Mirrors

Actuators

Deformable mirrors

Metrology

Polishing

Spatial frequencies

Optical testing

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