Optimizing a deep-UV projection lens with a 442-nm interferometer

Chunsheng Huang; Hwan J. Jeong; Bruce J. Ruff

doi:10.1117/12.22798

1 November 1990 Optimizing a deep-UV projection lens with a 442-nm interferometer

Chunsheng Huang, Hwan J. Jeong, Bruce J. Ruff

Proceedings Volume 1333, Advanced Optical Manufacturing and Testing; (1990) https://doi.org/10.1117/12.22798
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

Minimization of aberrations of a microlithographic projection lens is one of the more important processes in manufacturing a wafer stepper. It is difficult to optimize a Deep UV (249 nm) projection lens without a DUV interferometer. This paper will present the technique and result of testing and optimizing a DUV projection lens with a Twyman-Green interferometer which employs a HeCd laser (442 nanometers ) for a source. Testing the DUV lens with a visible wavelength interferometer inevitably degrades the sensitivity and accuracy of the interferometric testing process due to a large change in wavelength. The minimum aberration tested and optimized by the HeCd Twyman-Green interferometer will not correspond to the best performance of the DUV projection lens. This is because there is a residue of aberrations caused by testing the lens at a wavelength other than the 249 nm wavelength for which it was designed. To solve this problem, a synthetic wavefront predicted by a lens design program at 442 nm was generated and converted to Zernike polynomial coefficients. The true aberrations of the projection lens are obtained by subtracting the synthetic wavefront from the measured wavefront.

Citation Download Citation

Chunsheng Huang, Hwan J. Jeong, and Bruce J. Ruff "Optimizing a deep-UV projection lens with a 442-nm interferometer", Proc. SPIE 1333, Advanced Optical Manufacturing and Testing, (1 November 1990); https://doi.org/10.1117/12.22798

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available