Translator Disclaimer
Paper
1 November 1990 Platinum coating of an x-ray mirror for SR lithography
Author Affiliations +
Abstract
Three kinds of deposition methods : ECR ( Electron Cycloiron Resonance ) sputtering, Ion Beam Sputtering (IBS) and conventional Vacuum Evaporation (VE) are compared to obtain highly reflective X-ray mirrors. ECR sputtered platinum film shows the highest X-ray reflectivity, because it exhibits the smallest surface roughness, a. The surface roughness and morphology of Pt films are investigated using SEM, STM and X-ray reflectivity measurements. The surface roughness of VE films is more than 0.8 nm. ECR and lBS films have optimum thicknesses which yield minimum surface roughness. The minimum surface roughness of the ECR film is 0.30 nm and X-ray reflectivity of this film does not vary before and after baking ( 250°C x 40 hours). ECR sputtered film is therefore the best one for preparing high quality X-ray mirrors.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sei-ichi Itabashi, Ikuo Okada, Takashi Kaneko, Seitaro Matsuo, and Hideo Yoshihara "Platinum coating of an x-ray mirror for SR lithography", Proc. SPIE 1333, Advanced Optical Manufacturing and Testing, (1 November 1990); https://doi.org/10.1117/12.22813
PROCEEDINGS
10 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT

Focus tunable mirrors made by ionic polymer-metal composite
Proceedings of SPIE (September 12 2014)
Differential deposition for figure correction of x-ray mirrors
Proceedings of SPIE (September 09 2019)
Reflectance Of X Ray Mirrors From 3.8 To 50 keV...
Proceedings of SPIE (May 03 1982)
X-ray mirrors for SR lithography (Invited Paper)
Proceedings of SPIE (October 20 1992)
Low-loss ion beam sputtered coatings in the nineties
Proceedings of SPIE (November 04 1994)

Back to Top