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1 November 1990 Robust, sub-angstrom-level midspatial-frequency profilometry
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Abstract
The paper indicates the emerging requirements for profilometry instruments for use in the fabrication and characterisation of modern optical systems. Important design principles are covered, together with some of the problems which can be experienced. Examples of a number of systems recently developed are given both stand alone systems and those which operate insitu to the machining process.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul E. Glenn "Robust, sub-angstrom-level midspatial-frequency profilometry", Proc. SPIE 1333, Advanced Optical Manufacturing and Testing, (1 November 1990); https://doi.org/10.1117/12.22802
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