Precision dual-positioning system

Shigeru Sakuta; Katsunobu Ueda; Kiyoshi Ogawa; Yoshinaga Moriwaki; Mitsuo Sumiya

doi:10.1117/12.22831

1 November 1990 Precision dual-positioning system

Shigeru Sakuta, Katsunobu Ueda, Kiyoshi Ogawa, Yoshinaga Moriwaki, Mitsuo Sumiya

Proceedings Volume 1334, Current Developments in Optical Engineering IV; (1990) https://doi.org/10.1117/12.22831
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

As precision engineering has been improved in recent years, precision positioning systems withnanoineter accuracy are also required. Experimental precision dual positioning apparatus, consisting of friction drive and piezoelectric actuator", was made in Toshiba laboratory. In this apparatus, the piezoelectric actuator, designed for fine positioning, is mounted on top of the friction drive slide , designed for coarse positioning . Individual loops were closed by laser interferometer systems with 2.5nm resolution. The friction drive and piezoelectric actuator moved together , using a kind of inchworm movement method. The method made it possible for this positioning system to have an over 100mm stroke with 2.5nzn resolution and no backlash.

Citation Download Citation

Shigeru Sakuta, Katsunobu Ueda, Kiyoshi Ogawa, Yoshinaga Moriwaki, and Mitsuo Sumiya "Precision dual-positioning system", Proc. SPIE 1334, Current Developments in Optical Engineering IV, (1 November 1990); https://doi.org/10.1117/12.22831

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