Automation of IRFPA production processes

James Egerton; Nancy Dieselman; William M. Higgins; Peter H. Zimmermann; Ashok Sood

doi:10.1117/12.23026

1 November 1990 Automation of IRFPA production processes

James Egerton, Nancy Dieselman, William M. Higgins, Peter H. Zimmermann, Ashok Sood

Proceedings Volume 1339, Materials, Devices, Techniques, and Applications for Z-Plane Focal Plane Array Technology II; (1990) https://doi.org/10.1117/12.23026
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

This paper examines three applications of automation technology in the manufacture of Infrared Focal Plane arrays. Areas to be examined ar wafer handling during array fabrication up through dicing, automation ofLiquid Phase Epitaxy, and automation of bump bonding. The collection of factory data and its use in control of the manufacturing process will also be discussed. Specifics related to the production of Z-module architecture will be emphasized.

Citation Download Citation

James Egerton, Nancy Dieselman, William M. Higgins, Peter H. Zimmermann, and Ashok Sood "Automation of IRFPA production processes", Proc. SPIE 1339, Materials, Devices, Techniques, and Applications for Z-Plane Focal Plane Array Technology II, (1 November 1990); https://doi.org/10.1117/12.23026

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