Determination of the characteristic parameter of nanofilm based on ellipsometer and scanning electron microscope

Chong Yue; Lei Tao; Jin Zhou; Jun Xiong; Weifen He

doi:10.1117/12.3049736

18 November 2024 Determination of the characteristic parameter of nanofilm based on ellipsometer and scanning electron microscope

Chong Yue, Lei Tao, Jin Zhou, Jun Xiong, Weifen He

Author Affiliations +

Proceedings Volume 13398, Fourth International Conference on Optics and Communication Technology (ICOCT 2024); 1339814 (2024) https://doi.org/10.1117/12.3049736
Event: Fourth International Conference on Optics and Communication Technology (ICOCT 2024), 2024, Nanjing, China

Abstract

In this paper, ellipsometer combined with scanning electron microscope for solving the complex refractive index of nano film is proposed. Firstly, the interface of the nano film was measured using scanning electron microscope to obtain its thickness. Next, measure the parameters of the ellipsometer to establish the corresponding mathematical model and obtain the characteristic parameters of the thin film. Then, optimize the ellipsoidal mathematical model by comparing the film thickness obtained by scanning electron microscopy with that obtained by ellipsometry. Ultimately obtaining accurate film thickness and optical constants. The results show that the relative error of the calculation result of the optical properties is less than 1.0 nm and the measured values of optical constants are also consistent with the theoretical values. At the same time, the results derived from our method are in better agreement with the standard value, which shows that the measurement results are true and effective. Therefore, this method reveals the possibility of high-precision measurement of nano film through ellipsometer and scanning electron microscope, and makes it be a much better option to be employed for further micro-nano structures analysis applications.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Chong Yue, Lei Tao, Jin Zhou, Jun Xiong, and Weifen He "Determination of the characteristic parameter of nanofilm based on ellipsometer and scanning electron microscope", Proc. SPIE 13398, Fourth International Conference on Optics and Communication Technology (ICOCT 2024), 1339814 (18 November 2024); https://doi.org/10.1117/12.3049736

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