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1 February 1991 Design and analysis of aspherical multilayer imaging x-ray microscope
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Abstract
Considerable effort has been devoted recently to the design, analysis, fabrication, and testing of spherical Schwarzschild microscopes for soft x-ray applications in microscopy and projection lithography. The spherical Schwarzschild microscope consist of two concentric spherical mirrors configured such that third order spherical aberration and coma are zero. Since multilayers are used on the mirror substrates for x-ray applications, it is desirable to have only two reflecting surfaces in a microscope. In order to reduce microscope aberrations and increase the field of view, generalized mirror surface profiles have been considered in this study. Based on incoherent, sine wave modulation transfer function (MTF) calculations, the object plane resolution of a microscope has been analyzed as a function of the object height and numerical aperture (NA) of the primary for several spherical Schwarzschild, conic, and aspherical reflecting two-mirror microscope configurations. The ultimate resolution of an aspherical two-mirror microscope appears to be about 200 A when using 100 A radiation. Better resolution can be produced when shorter wavelength radiation is used.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David L. Shealy, Wu Jiang, and Richard B. Hoover "Design and analysis of aspherical multilayer imaging x-ray microscope", Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, (1 February 1991); https://doi.org/10.1117/12.23185
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