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1 February 1991 Design considerations for multilayer-coated Schwarzchild objectives for the XUV
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Abstract
The performance of multilayer-coated Schwarzschild objectives, and similar near normal incidence soft xray focussing systems, can be affected by the changing angles of incidence for different rays and possible variations in multilayer period across the curved mirror surfaces. A design analysis which considers these issues is presented, using as an example a 20 times demagnifying Schwarzschild objective coated with molybdenum/silicon multilayers for operation at roughly 76 eV. The large bandwidth of these multi].ayers eases requirements on control of the variation of the d-spacing for the system considered. Implications for extension to similar systems operating with different magnifications, sizes, and photon energies are discussed.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jeffrey B. Kortright and James H. Underwood "Design considerations for multilayer-coated Schwarzchild objectives for the XUV", Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, (1 February 1991); https://doi.org/10.1117/12.23182
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