Fabrication of multilayer Bragg-Fresnel zone plates for the soft x-ray range

Chantal G. Khan Malek; T. Moreno; Philippe Guerin; F. R. Ladan; Jean-Rene Rivoira; Robert J. Barchewitz

doi:10.1117/12.23231

1 February 1991 Fabrication of multilayer Bragg-Fresnel zone plates for the soft x-ray range

Chantal G. Khan Malek, T. Moreno, Philippe Guerin, F. R. Ladan, Jean-Rene Rivoira, Robert J. Barchewitz

Proceedings Volume 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography; (1991) https://doi.org/10.1117/12.23231
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

We report on the fabrication of linear and circular reflective Bragg-Fresnel zone plates made by a multistep process using microfabrication technologies. The zone plate patterns were generated by electron beam lithography on a Mo/C triode sputtered multilayer interference mirror. The minimum zone size was 0.3 p.m wide. The pattern was transferred anisotropically into the multilayer by reactive ion etching in a fluorinated plasma. An intermediate metallic mask made by lift-off was used for the transfer process. The groove depth was monitored by following the reflectivity of the structure with a helium-neon laser during the etching process. The groove profile and dimensional control were considered.

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Chantal G. Khan Malek, T. Moreno, Philippe Guerin, F. R. Ladan, Jean-Rene Rivoira, and Robert J. Barchewitz "Fabrication of multilayer Bragg-Fresnel zone plates for the soft x-ray range", Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, (1 February 1991); https://doi.org/10.1117/12.23231

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