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Abstract
The extension of present step and scan technology to EUV projection techniques to print patterns with .ljim feature sizes is examined.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Frits Zernike and Daniel N. Galburt "Ultraprecise scanning technology", Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, (1 February 1991); https://doi.org/10.1117/12.23196
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