Paper
13 December 2024 Study on the microstructure and optical properties of PbTe films prepared by magnetron sputtering
Lixin Liu, Jun Gou, Baohua An, Jiamin Jiang, Jun Wang
Author Affiliations +
Proceedings Volume 13496, AOPC 2024: Optical Sensing, Imaging Technology, and Applications; 134960R (2024) https://doi.org/10.1117/12.3047836
Event: Applied Optics and Photonics China 2024 (AOPC2024), 2024, Beijing, China
Abstract
We present a Si-based Photodetector with a broadband and fast response based on Lead telluride (PbTe) polycrystalline films prepared by magnetron sputtering technique. The prepared PbTe films are polycrystalline and the dominant surface is (111) plane. The best films have triangular morphology. The atomic ratio of Pb/Te tends to 1:1. The photoelectric property detection results show that the films deposited at 130 W for 10 minutes at room temperature have excellent properties. The fastest rise time and fall time of near infrared band can reach 900 microseconds and 700 microseconds respectively, and the longest detection band can reach 4.1 microns.
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Lixin Liu, Jun Gou, Baohua An, Jiamin Jiang, and Jun Wang "Study on the microstructure and optical properties of PbTe films prepared by magnetron sputtering", Proc. SPIE 13496, AOPC 2024: Optical Sensing, Imaging Technology, and Applications, 134960R (13 December 2024); https://doi.org/10.1117/12.3047836
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KEYWORDS
Sputter deposition

Photodetectors

Magnetrons

Mid infrared

Optical properties

Scanning electron microscopy

Film thickness

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