Application of silicon nitride feedback waveguide optical sensing based on Fano resonance

Qian Meng; Mingrui Zhang; Jia Li; Yuxing Yang

doi:10.1117/12.3048461

13 December 2024 Application of silicon nitride feedback waveguide optical sensing based on Fano resonance

Qian Meng, Mingrui Zhang, Jia Li, Yuxing Yang

Author Affiliations +

Proceedings Volume 13499, AOPC 2024: Optical Devices and Integration; 1349911 (2024) https://doi.org/10.1117/12.3048461
Event: Applied Optics and Photonics China 2024 (AOPC2024), 2024, Beijing, China

Abstract

In this paper, the basic principle of Fano resonance and its application in optical sensors are discussed. On the basis of the theory, a feedback waveguide structure based on silicon nitride (Si3N4) material is proposed. The Fano resonance line can be controlled precisely by changing the related parameters, such as the distance between the micro-ring and the feedback waveguide, the period and the radius of the nanopore. The simulation results demonstrate that the designed device generates sharp Fano resonance peaks in a specific wavelength range, in accordance with the theoretical analysis. The sensitivity of 130 nm/RIU and free spectral range (FSR) up to 54.55 nm, indicated that it is suitable for high-precision chemical and biological analysis. Compared with traditional optical sensors, the device structure based on silicon nitride material exhibits large detection bandwidth, high sensitivity and ultra-low insertion loss. In addition, the footprint of the designed device is 25 × 15 um, which is smaller than conventional microring resonant cavities. With the advantages of the ultra-compact, large detection bandwidth, high sensitivity and low insertion loss, the proposed feedback waveguide can be widely used in biochemical detection, environmental monitoring, food safety and medical diagnosis.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Qian Meng, Mingrui Zhang, Jia Li, and Yuxing Yang "Application of silicon nitride feedback waveguide optical sensing based on Fano resonance", Proc. SPIE 13499, AOPC 2024: Optical Devices and Integration, 1349911 (13 December 2024); https://doi.org/10.1117/12.3048461

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KEYWORDS

Waveguides

Microrings

Refractive index

Silicon nitride

Sensors

Nanopores

Optical sensors

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