Investigation of uniform deposition of GaInAsP quantum wells by MOCVD

Norbert Puetz; Carla J. Miner; G. Hingston; Chris J. Moore; Brad Watt; Glen Hillier

doi:10.1117/12.47675

1 March 1991 Investigation of uniform deposition of GaInAsP quantum wells by MOCVD

Norbert Puetz, Carla J. Miner, G. Hingston, Chris J. Moore, Brad Watt, Glen Hillier

Proceedings Volume 1361, Physical Concepts of Materials for Novel Optoelectronic Device Applications I: Materials Growth and Characterization; (1991) https://doi.org/10.1117/12.47675
Event: Physical Concepts of Materials for Novel Optoelectronic Device Applications, 1990, Aachen, Germany

Abstract

The growth pattern of GaInAsfInP quantum wells on large area InP substrates has been investigated. Scanning Photoluminescence (sPL) performed at room temperature has been utilized to map the entire area of the wafers at a spatial resolution of 600x600j. tm. It will be shown that the local variation in energy shift of the quantum well luminescence is caused by variations in growth rate which matches the growth rate distribution in GaInAs bulk layers. The sPL data were compared to model calculations of the growth rate as a function of position on the wafer. Through the acquired insight in the growth process new process parameters could be chosen where not only the uniformity of quantum well thickness but also that of GaInAs bulk layers was substantially improved.

Citation Download Citation

Norbert Puetz, Carla J. Miner, G. Hingston, Chris J. Moore, Brad Watt, and Glen Hillier "Investigation of uniform deposition of GaInAsP quantum wells by MOCVD", Proc. SPIE 1361, Physical Concepts of Materials for Novel Optoelectronic Device Applications I: Materials Growth and Characterization, (1 March 1991); https://doi.org/10.1117/12.47675

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available