Paper
1 March 1991 Molecular beam epitaxy GaAs on Si: material and devices for optical interconnects
Paul Panayotatos, Alexandros Georgakilas, Jean-Loic Mourrain, Aristos Christou
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Abstract
(100)CdZnTe epilayers are grown by hot wall beam epitaxy (HWBE) on (100) GaAs. The CdZnTe epilayers are used as substrates for the growth of Hg1_CdTe (x = 0.27 - 0.32) layers by closed space vapor phase epitaxy. The Hg1CdTe layers have an x-ray rocking curve width of 59 10 arc sec measured across a 1 inch wafer. The layers are p-type with a hole concentration of 2 - 4.1016crri3 and a mobility of 250 - 350cm2/Vs at 77 K. Photoconductivity decay measurements give the lifetime of excess carriers which is governed by recombination via Shockley-Read centres at T < 250 K. Linear arrays of planar, photovoltaic detectors are fabricated by implantation of B ions. The elements size is 50 50,arn2, the space between the elements is 50prn. The R0A product, the responsivity and the cut-off wavelength of the p-n junction are measured at 192 K. The variation of the responsivity across a 16 element array is less than 4 %, the cut-off wavelength varies between 4.77,um and 4.83μm.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul Panayotatos, Alexandros Georgakilas, Jean-Loic Mourrain, and Aristos Christou "Molecular beam epitaxy GaAs on Si: material and devices for optical interconnects", Proc. SPIE 1361, Physical Concepts of Materials for Novel Optoelectronic Device Applications I: Materials Growth and Characterization, (1 March 1991); https://doi.org/10.1117/12.24348
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KEYWORDS
Silicon

Gallium arsenide

Diodes

Optoelectronic devices

Interfaces

Doping

Etching

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