Properties of ZnSe/ZnS grown by MOVPE on a rotating substrate

Joerg Soellner; Michael Heuken; Klaus Heime

doi:10.1117/12.24323

1 March 1991 Properties of ZnSe/ZnS grown by MOVPE on a rotating substrate

Joerg Soellner, Michael Heuken, Klaus Heime

Proceedings Volume 1361, Physical Concepts of Materials for Novel Optoelectronic Device Applications I: Materials Growth and Characterization; (1991) https://doi.org/10.1117/12.24323
Event: Physical Concepts of Materials for Novel Optoelectronic Device Applications, 1990, Aachen, Germany

Abstract

In this work we will report the growth of ZnSe and ZnS grown by atmospheric pressure MOVPE with a rotating substrate which allows a very good thickness homogeneity of the layers. As reactants diethylzinc dimethyizinc diethylselenide and H2S and as carrier gas H2 was used. High mobilities and low background doping concentrations (i3ooK 370 cm2/Vs n3(JK 7x 1014 cm3) sharp excitonic PL features and very thin (2nm) ZnS/ZnSe multilayer structures demonstrate the facilities of this growth technique.

Citation Download Citation

Joerg Soellner, Michael Heuken, and Klaus Heime "Properties of ZnSe/ZnS grown by MOVPE on a rotating substrate", Proc. SPIE 1361, Physical Concepts of Materials for Novel Optoelectronic Device Applications I: Materials Growth and Characterization, (1 March 1991); https://doi.org/10.1117/12.24323

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available