Nondestructive investigations of multilayer dielectrical coatings

Alexander G. Shapiro; Igor V. Yaminsky

doi:10.1117/12.24473

1 February 1991 Nondestructive investigations of multilayer dielectrical coatings

Alexander G. Shapiro, Igor V. Yaminsky

Proceedings Volume 1362, Physical Concepts of Materials for Novel Optoelectronic Device Applications II: Device Physics and Applications; (1991) https://doi.org/10.1117/12.24473
Event: Physical Concepts of Materials for Novel Optoelectronic Device Applications, 1990, Aachen, Germany

Abstract

The paper presents an approach to the nondestructive ellipsometric investigation and computer simulation of dielectric structures with known thicknesses. Three-dimensional profile studies of surface microrelief using an atomic force microscope are also considered. The proposed approach enables the examination of an optical waveguide''s sections and permits investigations of interferometric coatings and the numerical analysis of various multilayer dielectric systems.

Citation Download Citation

Alexander G. Shapiro and Igor V. Yaminsky "Nondestructive investigations of multilayer dielectrical coatings", Proc. SPIE 1362, Physical Concepts of Materials for Novel Optoelectronic Device Applications II: Device Physics and Applications, (1 February 1991); https://doi.org/10.1117/12.24473

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