Coating development for high-energy KrF excimer lasers

James D. Boyer; Billie R. Mauro; Virgil E. Sanders

doi:10.1117/12.25028

1 March 1991 Coating development for high-energy KrF excimer lasers

James D. Boyer, Billie R. Mauro, Virgil E. Sanders

Proceedings Volume 1377, Excimer Laser Materials Processing and Beam Delivery Systems; (1991) https://doi.org/10.1117/12.25028
Event: Advances in Intelligent Robotics Systems, 1990, Boston, MA, United States

Abstract

Damage resistant optical coatings are needed for cost effective beam delivery systems for high energy laser applications. At excimer wavelengths the photon energy either exceeds or is comparable to bandgap energies of most materials and limits the materials suitable for optical coatings. Other constraints are imposed by limits on near specular scatter and fluorine resistance for selected components.

Citation Download Citation

James D. Boyer, Billie R. Mauro, and Virgil E. Sanders "Coating development for high-energy KrF excimer lasers", Proc. SPIE 1377, Excimer Laser Materials Processing and Beam Delivery Systems, (1 March 1991); https://doi.org/10.1117/12.25028

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