Gas handling technology for excimer lasers

Robert E. Turner; John L. Remo; Elaine Bradford; Alvin Dietz

doi:10.1117/12.25030

1 March 1991 Gas handling technology for excimer lasers

Robert E. Turner, John L. Remo, Elaine Bradford, Alvin Dietz

Proceedings Volume 1377, Excimer Laser Materials Processing and Beam Delivery Systems; (1991) https://doi.org/10.1117/12.25030
Event: Advances in Intelligent Robotics Systems, 1990, Boston, MA, United States

Abstract

Excimer laser performance and operational efficiency can be enhanced by simultaneously applying several different approaches related to gas technology. Causes of laser beam power and profile decay, as well as degradation of laser cczriponents are detailed with special regard to laser gases. 4ethods for canbating these deleterious effects are then detailed. These include in—depth discussion of (1) initial gas purity, (2) gas handling between source and laser, (3) laser operating techniques, and (4) in—situ gas purification.

Citation Download Citation

Robert E. Turner, John L. Remo, Elaine Bradford, and Alvin Dietz "Gas handling technology for excimer lasers", Proc. SPIE 1377, Excimer Laser Materials Processing and Beam Delivery Systems, (1 March 1991); https://doi.org/10.1117/12.25030

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