Producing a uniform excimer laser beam for materials processing applications

Jenifer Lynn Bunis; Chris Christian Abele; James D. Campbell; George F. Caudle

doi:10.1117/12.25020

1 March 1991 Producing a uniform excimer laser beam for materials processing applications

Jenifer Lynn Bunis, Chris Christian Abele, James D. Campbell, George F. Caudle

Proceedings Volume 1377, Excimer Laser Materials Processing and Beam Delivery Systems; (1991) https://doi.org/10.1117/12.25020
Event: Advances in Intelligent Robotics Systems, 1990, Boston, MA, United States

Abstract

Virtually every materials processing application which uses an excimer laser requires a uniform beam at the surface of the workpiece. Producing a uniform beam is non-trivial requiring both a uniform discharge and an optimized optical resonator. This paper explores the conditions necessary to produce and maintain a uniform beam as well as various ways of measuring the uniformity. For some applications conditioning optics such as homogenizers are required to further improve the uniformity of the beam. Various types of homogenizers will be described along with techniques used to image the uniform beam onto the surface of the workpiece.

Citation Download Citation

Jenifer Lynn Bunis, Chris Christian Abele, James D. Campbell, and George F. Caudle "Producing a uniform excimer laser beam for materials processing applications", Proc. SPIE 1377, Excimer Laser Materials Processing and Beam Delivery Systems, (1 March 1991); https://doi.org/10.1117/12.25020

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