What industry needs in a high-power excimer laser

John R. Lankard Sr.

doi:10.1117/12.25016

1 March 1991 What industry needs in a high-power excimer laser

John R. Lankard Sr.

Proceedings Volume 1377, Excimer Laser Materials Processing and Beam Delivery Systems; (1991) https://doi.org/10.1117/12.25016
Event: Advances in Intelligent Robotics Systems, 1990, Boston, MA, United States

Abstract

Scientific, or research excimer lasers have been around since tl1e mid- 1970s, and in the past few years industrial excimer lasers have started to evolve. This paper will address the demands of manufacturing operations on high power excimer lasers, 100 to 200 Watts, operating three shifts a day, seven days a week. The issues of durability, reliability, serviceability, and cost will be addressed.

Citation Download Citation

John R. Lankard Sr. "What industry needs in a high-power excimer laser", Proc. SPIE 1377, Excimer Laser Materials Processing and Beam Delivery Systems, (1 March 1991); https://doi.org/10.1117/12.25016

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available