MTF of photolithographic hologram

Lurong Guo; Yongkang Guo; Xiao-Chun Zhang

doi:10.1117/12.48907

1 March 1991 MTF of photolithographic hologram

Lurong Guo, Yongkang Guo, Xiao-Chun Zhang

Proceedings Volume 1392, Advanced Techniques for Integrated Circuit Processing; (1991) https://doi.org/10.1117/12.48907
Event: Processing Integration, 1990, Santa Clara, CA, United States

Abstract

This paper points out that the formation of photolithographic hologram (PLH) is a transfer process of two steps described below. Its modulation transfer function (MTF) is the product of the two steps. The former belongs to the traditional photosensitive holographic recording material. The latter belongs to the plasma etch transfer process which can be controlled while PLH is foiming. Therefore the modulation of the second step may be magnified. Furthermore we point out that this special performance of PLH would lead us to find a new way for embossed holography and the fabrication of HOEs.

Citation Download Citation

Lurong Guo, Yongkang Guo, and Xiao-Chun Zhang "MTF of photolithographic hologram", Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); https://doi.org/10.1117/12.48907

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