Growth of oxide superconducting thin films by plasma-enhanced MOCVD

Keiichi Kanehori; Nobuyuki Sugii

doi:10.1117/12.25754

1 March 1991 Growth of oxide superconducting thin films by plasma-enhanced MOCVD

Keiichi Kanehori, Nobuyuki Sugii

Proceedings Volume 1394, Progress In High-Temperature Superconducting Transistors and Other Devices; (1991) https://doi.org/10.1117/12.25754
Event: Processing Integration, 1990, Santa Clara, CA, United States

Abstract

The effects of plasma -enhancement on MOCVD for growing superconducting YBa2 Cu3 OX thin films is studied. It is revealed that plasma-enhancement accelerates crystal I ization of YBa 2 Cu 0 so that growth temperatures of superconducting fi Ims can be decreased by about 150 °C . Thin fi Ims grown by plasma-enhanced MOCVD at 515°C and 580°C indicate zero-resistivity temperatures of 60K and 84K, respectively. Critical current density in the film grown by plasma-enhanced MOCVD at 580 °C is 1O A/cm2 at 77K. Infrared absorption spectroscopy and ultraviolet and visible emission spectroscopy clarify that plasma excite the metalorganic compounds and that this excitation promotes oxidization of metalorgan ic compounds and crystal I izat ion of YBa2Cu3O.

Citation Download Citation

Keiichi Kanehori and Nobuyuki Sugii "Growth of oxide superconducting thin films by plasma-enhanced MOCVD", Proc. SPIE 1394, Progress In High-Temperature Superconducting Transistors and Other Devices, (1 March 1991); https://doi.org/10.1117/12.25754

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available