Industrial excimer and CO2 TEA lasers with kilowatt average output power

Hubertus M. von Bergmann; Pieter L. Swart

doi:10.1117/12.25939

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1 February 1991 Industrial excimer and CO2 TEA lasers with kilowatt average output power

Hubertus M. von Bergmann, Pieter L. Swart

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Proceedings Volume 1397, 8th Intl Symp on Gas Flow and Chemical Lasers; (1991) https://doi.org/10.1117/12.25939
Event: Eighth International Symposium on Gas-Flow and Chemical Lasers, 1990, Madrid, Spain

Abstract

We have developed a high repetition rate high average power pulsed laser system intended for industrial applications. The system has been designed for operation as an excimer and CO2 TEA laser and is capable of continuous operation at repetition rates of up to 2 kHz. A closed loop gas recirculation system, driven by a large diameter, magnetically coupled, axial fan is employed, providing gas flow velocities of up to 90 m/s. The laser delivers maximum average output powers of more than 500 W as KrF excimer and 2.5 kW as C02 TEA laser.

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Hubertus M. von Bergmann and Pieter L. Swart "Industrial excimer and CO2 TEA lasers with kilowatt average output power", Proc. SPIE 1397, 8th Intl Symp on Gas Flow and Chemical Lasers, (1 February 1991); https://doi.org/10.1117/12.25939

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