High-sensitivity interferometric technique for strain measurements

Arkady S. Voloshin; Adel F. Bastawros

doi:10.1117/12.26116

1 March 1991 High-sensitivity interferometric technique for strain measurements

Arkady S. Voloshin, Adel F. Bastawros

Proceedings Volume 1400, Optical Fabrication and Testing; (1991) https://doi.org/10.1117/12.26116
Event: Singapore, 1990, -, Singapore

Abstract

A high sensitivity strain measurement procedure that combines moire interferometry and digital image processing, has been successfully implemented to determine thermally induced strains in electronic components. The technique is called Fractional Fringe Moire Interferometry (FFMI). It produces whole field displacement information that are used to compute strains in a certain plane. Displacements in the submicron domain are detected with excellent spatial resolution over the area of interest. An example is presented here to illustrate the use of the technique to monitor thermally induced deformations in a specimen made from a plastic DIP device. The specimen was uniformly heated from room temperature to 90 degree(s)C, and the resulting moire fringe patterns were recorded, analyzed using digital-image-processing and in plane displacements in the package were determined. Strain components were then computed by simple differentiation of the acquired displacement fields. Contour maps showing actual thermo/mechanical strain components in the device were constructed. Those maps can provide an excellent tool for strain analysis of microelectronic devices regardless of the structural complexity of the device.

Citation Download Citation

Arkady S. Voloshin and Adel F. Bastawros "High-sensitivity interferometric technique for strain measurements", Proc. SPIE 1400, Optical Fabrication and Testing, (1 March 1991); https://doi.org/10.1117/12.26116

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available