Output power stabilization of a XeCl excimer laser by HCl gas injection

Satoshi Ogura; Yukio Kawakubo; Kouji Sasaki; Yoshiyuki Kubota; Atsushi Miki

doi:10.1117/12.43641

1 May 1991 Output power stabilization of a XeCl excimer laser by HCl gas injection

Satoshi Ogura, Yukio Kawakubo, Kouji Sasaki, Yoshiyuki Kubota, Atsushi Miki

Proceedings Volume 1412, Gas and Metal Vapor Lasers and Applications; (1991) https://doi.org/10.1117/12.43641
Event: Optics, Electro-Optics, and Laser Applications in Science and Engineering, 1991, Los Angeles, CA, United States

Abstract

A laser output power control system which has an ability to realize high stability of the laser output power in long-term operation is proposed for high-power rare-gas halide excimer lasers. The system has a function of maintaining laser gas conditions, mainly the halogen gas concentration, constant against the gas degradation in the laser tube. As a result the laser output power is stabilized at near maximum available power. The system has been applied to a 20-W UV-preionozed XeCl excimer laser and the laser output power has been stabilized for 8 hours successfully with a fluctuation less than +/- 2% at 20 W.

Citation Download Citation

Satoshi Ogura, Yukio Kawakubo, Kouji Sasaki, Yoshiyuki Kubota, and Atsushi Miki "Output power stabilization of a XeCl excimer laser by HCl gas injection", Proc. SPIE 1412, Gas and Metal Vapor Lasers and Applications, (1 May 1991); https://doi.org/10.1117/12.43641

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