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1 May 1991 Output power stabilization of a XeCl excimer laser by HCl gas injection
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Proceedings Volume 1412, Gas and Metal Vapor Lasers and Applications; (1991) https://doi.org/10.1117/12.43641
Event: Optics, Electro-Optics, and Laser Applications in Science and Engineering, 1991, Los Angeles, CA, United States
Abstract
A laser output power control system which has an ability to realize high stability of the laser output power in long-term operation is proposed for high-power rare-gas halide excimer lasers. The system has a function of maintaining laser gas conditions, mainly the halogen gas concentration, constant against the gas degradation in the laser tube. As a result the laser output power is stabilized at near maximum available power. The system has been applied to a 20-W UV-preionozed XeCl excimer laser and the laser output power has been stabilized for 8 hours successfully with a fluctuation less than +/- 2% at 20 W.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Satoshi Ogura, Yukio Kawakubo, Kouji Sasaki, Yoshiyuki Kubota, and Atsushi Miki "Output power stabilization of a XeCl excimer laser by HCl gas injection", Proc. SPIE 1412, Gas and Metal Vapor Lasers and Applications, (1 May 1991); https://doi.org/10.1117/12.43641
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